Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6954256 | Gradient immersion lithography | John Doering | 2005-10-11 |
| 6943941 | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems | Kevin Cummings | 2005-09-13 |
| 6887625 | Assist features for use in lithographic projection | Johannes Jacobus Matheus Baselmans, Markus Schluter, Robert John Socha | 2005-05-03 |
| 6855486 | Lithographic method and apparatus | Jozef Marie Finders, Johannes Jacobus Matheus Baselmans, Igor Petrus Maria Bouchoms | 2005-02-15 |