Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6980281 | Lithographic apparatus and device manufacturing method | Uwe Mickan | 2005-12-27 |
| 6940587 | Lithographic apparatus and a measurement system | Hans Van Der Laan, Johannes Jacobus Matheus Baselmans, Antonius Johannes Josephus Van Dijsseldonk, Martinus Hendrikus Antonius Leenders | 2005-09-06 |
| 6879374 | Device manufacturing method, device manufactured thereby and a mask for use in the method | Jan Evert Van Der Werf, Erik Roelof Loopstra, Hans Meiling, Martinus Hendrikus Antonius Leenders | 2005-04-12 |