Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6963391 | Lithographic apparatus and device manufacturing method | George Arie Jan Fockert, Hans Van Der Laan | 2005-11-08 |
| 6937334 | Method of measuring alignment of a substrate with respect to a reference alignment mark | Rene Monshouwer, Jacobus Hermanus Maria Neijzen | 2005-08-30 |
| 6937344 | Method of measuring overlay | Rene Monshouwer, Jacobus Hermanus Maria Neijzen | 2005-08-30 |
| 6888151 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Haico Victor Kok | 2005-05-03 |
| 6879374 | Device manufacturing method, device manufactured thereby and a mask for use in the method | Erik Roelof Loopstra, Hans Meiling, Johannes Hubertus Josephina Moors, Martinus Hendrikus Antonius Leenders | 2005-04-12 |