Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6963391 | Lithographic apparatus and device manufacturing method | Jan Evert Van Der Werf, George Arie Jan Fockert | 2005-11-08 |
| 6960775 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Rene Hubert Jacobus Carpaij | 2005-11-01 |
| 6940587 | Lithographic apparatus and a measurement system | Johannes Jacobus Matheus Baselmans, Antonius Johannes Josephus Van Dijsseldonk, Martinus Hendrikus Antonius Leenders, Johannes Hubertus Josephina Moors | 2005-09-06 |
| 6897947 | Method of measuring aberration in an optical imaging system | Marco Hugo Petrus Moers | 2005-05-24 |