Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6894261 | Position measuring system for use in lithographic apparatus | Thomas Josephus Maria Castenmiller, Martinus Hendricus Hoeks, Patrick David Vogelsang, Erik Roelof Loopstra, YimBun P. Kwan | 2005-05-17 |
| 6875992 | Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method | Thomas Josephus Maria Castenmiller, Martinus Hendricus Hoeks, Patrick David Vogelsang, Erik Roelof Loopstra, YimBun P. Kwan | 2005-04-05 |