Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6952253 | Lithographic apparatus and device manufacturing method | Joeri Lof, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more | 2005-10-04 |
| 6867844 | Immersion photolithography system and method using microchannel nozzles | Herman Vogel, Klaus Simon | 2005-03-15 |