Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6952253 | Lithographic apparatus and device manufacturing method | Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more | 2005-10-04 |
| 6936385 | Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods | Henricus Wilhelmus Maria Van Buel, Cheng-Qun Gui, Fransiscus Godefridus Casper Bijnen | 2005-08-30 |