Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6952253 | Lithographic apparatus and device manufacturing method | Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more | 2005-10-04 |
| 6882405 | Off-axis levelling in lithographic projection apparatus | Johannes Christiaan Maria Jasper, Gerrit Johannes Nijmeijer | 2005-04-19 |