Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6952253 | Lithographic apparatus and device manufacturing method | Joeri Lof, Antonius Theodorus Anna Maria Derksen, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more | 2005-10-04 |