Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955074 | Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby | Leon Martin Levasier, Anastasius Jacobus Anicetus Bruinsma, Jacob Klinkhamer, Petra Albertina Margaretha Dekkers-Rog | 2005-10-18 |
| 6924884 | Off-axis leveling in lithographic projection apparatus | Marcus Boonman, Petrus Johannes Maria Broodbakker, Mingcheng Zong, Jozef Cornelus Antonius Roijers | 2005-08-02 |
| 6882405 | Off-axis levelling in lithographic projection apparatus | Johannes Christiaan Maria Jasper, Theodorus Marinus Modderman | 2005-04-19 |