Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6924884 | Off-axis leveling in lithographic projection apparatus | Petrus Johannes Maria Broodbakker, Gerrit Johannes Nijmeijer, Mingcheng Zong, Jozef Cornelus Antonius Roijers | 2005-08-02 |