Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955074 | Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby | Leon Martin Levasier, Jacob Klinkhamer, Gerrit Johannes Nijmeijer, Petra Albertina Margaretha Dekkers-Rog | 2005-10-18 |