Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936385 | Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods | Joeri Lof, Cheng-Qun Gui, Fransiscus Godefridus Casper Bijnen | 2005-08-30 |
| 6914664 | Lithographic apparatus, alignment method and device manufacturing method | Keith Frank Best, Alexander Friz, Joseph Consolini, Cheng-Qun Gui | 2005-07-05 |