Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6952253 | Lithographic apparatus and device manufacturing method | Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more | 2005-10-04 |
| 6867844 | Immersion photolithography system and method using microchannel nozzles | Herman Vogel, Antonius Theodorus Anna Maria Derksen | 2005-03-15 |
| 6845145 | Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devices | Robert A. Selzer, Franz Rauch, Heinz Siegert, William Rudolf Friml, Joe Baker Gagnon +1 more | 2005-01-18 |