Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6845145 | Method of improving x-ray lithography in the sub 100nm range to create high quality semiconductor devices | Robert A. Selzer, Franz Rauch, Heinz Siegert, Klaus Simon, William Rudolf Friml +1 more | 2005-01-18 |