Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6853440 | Position correction in Y of mask object shift due to Z offset and non-perpendicular illumination | Engelbertus A. F. van de Pasch, Marcel Hendrikus Maria Beems, Daniel N. Galburt, Erik Roelof Loopstra | 2005-02-08 |