Issued Patents 2004
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819416 | Defect inspection method and apparatus therefor | Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto, Hiroaki Shishido +1 more | 2004-11-16 |
| 6806970 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Minori Noguchi, Yukio Kenbo, Takanori Ninomiya, Hirofumi Tsuchiyama | 2004-10-19 |
| 6800859 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Toshihiko Nakata, Minoru Yoshida, Sachio Uto | 2004-10-05 |
| 6797526 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Minori Noguchi, Takafumi Okabe, Yuji Takagi, Chie Shishido | 2004-09-28 |
| 6799130 | Inspection method and its apparatus, inspection system | Takafumi Okabe, Kaoru Sakai | 2004-09-28 |
| 6765201 | Ultraviolet laser-generating device and defect inspection apparatus and method therefor | Sachio Uto, Minoru Yoshida, Toshihiko Nakata | 2004-07-20 |
| 6762831 | Method and apparatus for inspecting defects | Yukihiro Shibata | 2004-07-13 |
| 6753972 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Minori Noguchi, Yukio Kenbo, Takanori Ninomiya, Hirofumi Tsuchiyama | 2004-06-22 |
| 6721047 | Method and apparatus for inspecting defects of a specimen | Atsushi Shimoda, Sachio Uto, Minoru Yoshida, Toshihiko Nakata | 2004-04-13 |
| 6690469 | Method and apparatus for observing and inspecting defects | Yukihiro Shibata, Kazuo Yamaguchi, Minoru Yoshida, Atsushi Yoshida, Kenji Oka +1 more | 2004-02-10 |
| 6674890 | Defect inspection method and apparatus therefor | Kenji Oka, Hiroshi Makihira, Yasuhiko Nakayama, Minoru Yoshida, Yukihiro Shibata +1 more | 2004-01-06 |