Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806970 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Minori Noguchi, Yukio Kenbo, Shunji Maeda, Takanori Ninomiya, Hirofumi Tsuchiyama | 2004-10-19 |
| 6794206 | Method of polishing a film | Mineo Nomoto, Hiroyuki Kojima, Hidemi Sato | 2004-09-21 |
| 6753972 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Minori Noguchi, Yukio Kenbo, Shunji Maeda, Takanori Ninomiya, Hirofumi Tsuchiyama | 2004-06-22 |