Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806970 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Yukio Kenbo, Shunji Maeda, Takanori Ninomiya, Hirofumi Tsuchiyama | 2004-10-19 |
| 6797526 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Shunji Maeda, Takafumi Okabe, Yuji Takagi, Chie Shishido | 2004-09-28 |
| 6797975 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2004-09-28 |
| 6753972 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Yukio Kenbo, Shunji Maeda, Takanori Ninomiya, Hirofumi Tsuchiyama | 2004-06-22 |
| 6731384 | Apparatus for detecting foreign particle and defect and the same method | Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Mitomo, Takashi Okawa, Akira Hamamatsu +1 more | 2004-05-04 |