Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797975 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Minori Noguchi, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2004-09-28 |
| 6777677 | Method of inspecting pattern and inspecting instrument | Mari Nozoe, Shigeaki Hijikata, Kenji Watanabe, Koji Abe | 2004-08-17 |
| 6731384 | Apparatus for detecting foreign particle and defect and the same method | Yoshimasa Ohshima, Minori Noguchi, Kenji Mitomo, Takashi Okawa, Akira Hamamatsu +1 more | 2004-05-04 |