Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6798504 | Apparatus and method for inspecting surface of semiconductor wafer or the like | Tatsuya Sato, Yuichiro Kato | 2004-09-28 |
| 6731384 | Apparatus for detecting foreign particle and defect and the same method | Yoshimasa Ohshima, Minori Noguchi, Hidetoshi Nishiyama, Takashi Okawa, Akira Hamamatsu +1 more | 2004-05-04 |