Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797975 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ooshima, Kenji Watanabe, Tetsuya Watanabe +1 more | 2004-09-28 |
| 6731384 | Apparatus for detecting foreign particle and defect and the same method | Yoshimasa Ohshima, Minori Noguchi, Hidetoshi Nishiyama, Kenji Mitomo, Takashi Okawa +1 more | 2004-05-04 |