Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797526 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Shunji Maeda, Minori Noguchi, Yuji Takagi, Chie Shishido | 2004-09-28 |
| 6799130 | Inspection method and its apparatus, inspection system | Shunji Maeda, Kaoru Sakai | 2004-09-28 |