Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828554 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2004-12-07 |
| 6797526 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Shunji Maeda, Minori Noguchi, Takafumi Okabe, Yuji Takagi, Chie Shishido | 2004-09-28 |
| 6753518 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada, Yasutsugu Usami | 2004-06-22 |
| 6744057 | Convergent charged particle beam apparatus and inspection method using same | Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada, Taku Ninomiya | 2004-06-01 |
| 6717142 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2004-04-06 |
| 6703850 | Method of inspecting circuit pattern and inspecting instrument | Mari Nozoe, Hiroyuki Shinada, Kenji Watanabe, Keiichi Saiki, Aritoshi Sugimoto +2 more | 2004-03-09 |