Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831998 | Inspection system for circuit patterns and a method thereof | Hiroya Koshishiba, Hideaki Doi, Mitsunobu Isobe, Kazushi Yoshimura, Haruomi Kobayashi | 2004-12-14 |
| 6797526 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Maki Tanaka, Shunji Maeda, Minori Noguchi, Takafumi Okabe, Yuji Takagi | 2004-09-28 |
| 6791082 | Process conditions change monitoring systems that use electron beams, and related monitoring methods | Osamu Komuro, Hidetoshi Morokuma | 2004-09-14 |
| 6791096 | Process conditions change monitoring systems that use electron beams, and related monitoring methods | Osamu Komuro, Hidetoshi Morokuma | 2004-09-14 |
| 6756589 | Method for observing specimen and device therefor | Kenji Obara, Yuji Takagi, Atsushi Shimoda, Ryou Nakagaki, Seiji Isogai +3 more | 2004-06-29 |
| 6674890 | Defect inspection method and apparatus therefor | Shunji Maeda, Kenji Oka, Hiroshi Makihira, Yasuhiko Nakayama, Minoru Yoshida +1 more | 2004-01-06 |