Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6803573 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Osamu Komuro, Tatsuya Maeda, Juntaro Arima +1 more | 2004-10-12 |
| 6791082 | Process conditions change monitoring systems that use electron beams, and related monitoring methods | Osamu Komuro, Chie Shishido | 2004-09-14 |
| 6791096 | Process conditions change monitoring systems that use electron beams, and related monitoring methods | Osamu Komuro, Chie Shishido | 2004-09-14 |
| 6713761 | Scanning electron microscope | Yoshinori Nakada, Shunsuke Koshihara, Ryuichirou Tamochi, Yayoi Hosoya | 2004-03-30 |