Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6803573 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima +1 more | 2004-10-12 |
| 6791082 | Process conditions change monitoring systems that use electron beams, and related monitoring methods | Hidetoshi Morokuma, Chie Shishido | 2004-09-14 |
| 6791096 | Process conditions change monitoring systems that use electron beams, and related monitoring methods | Hidetoshi Morokuma, Chie Shishido | 2004-09-14 |
| 6765204 | Microstructured pattern inspection method | Fumihiro Sasajima, Fumio Mizuno | 2004-07-20 |