Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831737 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Toshihiko Nakata, Shunzi Maeda | 2004-12-14 |
| 6756589 | Method for observing specimen and device therefor | Kenji Obara, Yuji Takagi, Ryou Nakagaki, Seiji Isogai, Yasuhiko Ozawa +3 more | 2004-06-29 |
| 6721047 | Method and apparatus for inspecting defects of a specimen | Sachio Uto, Minoru Yoshida, Shunji Maeda, Toshihiko Nakata | 2004-04-13 |