Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831737 | Apparatus and method for inspecting pattern | Minoru Yoshida, Toshihiko Nakata, Shunzi Maeda, Atsushi Shimoda | 2004-12-14 |
| 6819416 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Hiroaki Shishido +1 more | 2004-11-16 |
| 6800859 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida | 2004-10-05 |
| 6765201 | Ultraviolet laser-generating device and defect inspection apparatus and method therefor | Minoru Yoshida, Toshihiko Nakata, Shunji Maeda | 2004-07-20 |
| 6721047 | Method and apparatus for inspecting defects of a specimen | Atsushi Shimoda, Minoru Yoshida, Shunji Maeda, Toshihiko Nakata | 2004-04-13 |