Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831737 | Apparatus and method for inspecting pattern | Sachio Uto, Minoru Yoshida, Shunzi Maeda, Atsushi Shimoda | 2004-12-14 |
| 6831277 | Method for measuring dimensions and alignment of thin film magnetic head and apparatus therefor | Hideaki Sasazawa, Kenji Furusawa, Minako Morisato, Hideo Yamakura, Toshio Tamura | 2004-12-14 |
| 6825437 | Apparatus enabling particle detection utilizing wide view lens | Hiroyuki Nakano, Takeshi Arai | 2004-11-30 |
| 6819416 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto +1 more | 2004-11-16 |
| 6800859 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Yasuhiro Yoshitake, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2004-10-05 |
| 6778272 | Method of processing a semiconductor device | Hiroyuki Nakano, Masayoshi Serizawa | 2004-08-17 |
| 6765201 | Ultraviolet laser-generating device and defect inspection apparatus and method therefor | Sachio Uto, Minoru Yoshida, Shunji Maeda | 2004-07-20 |
| 6721047 | Method and apparatus for inspecting defects of a specimen | Atsushi Shimoda, Sachio Uto, Minoru Yoshida, Shunji Maeda | 2004-04-13 |
| 6712928 | Method and its apparatus for detecting floating particles in a plasma processing chamber and an apparatus for processing a semiconductor device | Hiroyuki Nakano | 2004-03-30 |