Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819416 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto +1 more | 2004-11-16 |
| 6800859 | Method and equipment for detecting pattern defect | Yasuhiro Yoshitake, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2004-10-05 |