Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6690469 | Method and apparatus for observing and inspecting defects | Yukihiro Shibata, Shunji Maeda, Kazuo Yamaguchi, Minoru Yoshida, Atsushi Yoshida +1 more | 2004-02-10 |
| 6674890 | Defect inspection method and apparatus therefor | Shunji Maeda, Hiroshi Makihira, Yasuhiko Nakayama, Minoru Yoshida, Yukihiro Shibata +1 more | 2004-01-06 |