Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828554 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2004-12-07 |
| 6759655 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami +1 more | 2004-07-06 |
| 6753518 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Maki Tanaka, Hiroyuki Shinada, Yasutsugu Usami | 2004-06-22 |
| 6744057 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Hiroyuki Shinada, Taku Ninomiya | 2004-06-01 |
| 6717142 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Maki Tanaka, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2004-04-06 |