Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806970 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Minori Noguchi, Yukio Kenbo, Shunji Maeda, Hirofumi Tsuchiyama | 2004-10-19 |
| 6792359 | Method for inspecting defect and system therefor | Seiji Isogai, Shigeru Matsui, Toshiei Kurosaki | 2004-09-14 |
| 6760472 | Identification method for an article using crystal defects | Kazuo Takeda, Aritoshi Sugimoto | 2004-07-06 |
| 6753972 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Minori Noguchi, Yukio Kenbo, Shunji Maeda, Hirofumi Tsuchiyama | 2004-06-22 |