Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6792359 | Method for inspecting defect and system therefor | Takanori Ninomiya, Seiji Isogai, Toshiei Kurosaki | 2004-09-14 |
| 6683683 | Defect inspection method and apparatus for silicon wafer | Koji Tomita, Muneo Maeshima, Yoshitaka Kodama, Hitoshi Komuro, Kazuo Takeda | 2004-01-27 |