Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6801830 | Operation confirming method and device for industrial machinery | Tatsumi Nakazato | 2004-10-05 |
| 6784632 | Positioning servo controller | — | 2004-08-31 |
| 6781340 | Method for detecting oscillation criticality of servo control system | — | 2004-08-24 |
| 6683683 | Defect inspection method and apparatus for silicon wafer | Muneo Maeshima, Shigeru Matsui, Yoshitaka Kodama, Hitoshi Komuro, Kazuo Takeda | 2004-01-27 |