Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806970 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Minori Noguchi, Yukio Kenbo, Shunji Maeda, Takanori Ninomiya | 2004-10-19 |
| 6753972 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Minori Noguchi, Yukio Kenbo, Shunji Maeda, Takanori Ninomiya | 2004-06-22 |