Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653637 | X-ray detector and charged-particle apparatus | Isao Ochiai, Kimio Kanda | 2003-11-25 |
| 6618850 | Inspection method and inspection system using charged particle beam | Hidetoshi Nishiyama, Mari Nozoe | 2003-09-09 |
| 6614022 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Yasuhiro Gunji +1 more | 2003-09-02 |
| 6583413 | Method of inspecting a circuit pattern and inspecting instrument | Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe, Hisaya Murakoshi +5 more | 2003-06-24 |
| 6583634 | Method of inspecting circuit pattern and inspecting instrument | Mari Nozoe, Kenji Watanabe, Keiichi Saiki, Aritoshi Sugimoto, Hiroshi Morioka +2 more | 2003-06-24 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2003-05-06 |
| 6559459 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Takashi Hiroi, Taku Ninomiya | 2003-05-06 |
| 6512227 | Method and apparatus for inspecting patterns of a semiconductor device with an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami +6 more | 2003-01-28 |
| 6509564 | WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD | Hiroyuki Suzuki, Atsuko Takafuji, Yasutsugu Usami, Shuji Sugiyama | 2003-01-21 |