Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654112 | Apparatus and method for inspecting defects | Minori Noguchi, Shunji Maeda, Yukihiro Shibata | 2003-11-25 |
| 6614923 | Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof | Chie Shishido, Yuji Takagi, Shuji Maeda, Takashi Hiroi, Masahiro Watanabe +1 more | 2003-09-02 |
| 6583413 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Yuko Sasaki, Mari Nozoe, Hisaya Murakoshi +5 more | 2003-06-24 |
| 6576559 | Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses | Toshihiko Nakata, Sachio Uto, Hiroyuki Nakano | 2003-06-10 |