Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657221 | Image classification method, observation method, and apparatus thereof with different stage moving velocities | Ryo Nakagaki, Yuji Takagi, Takashi Hiroi, Masahiro Watanabe, Kazuo Aoki | 2003-12-02 |
| 6654112 | Apparatus and method for inspecting defects | Shunji Maeda, Yukihiro Shibata, Takanori Ninomiya | 2003-11-25 |
| 6650409 | Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system | Yukio Kembo, Hiroshi Morioka, Hidetoshi Nishiyama, Hideaki Doi, Masataka Shiba +6 more | 2003-11-18 |
| 6597448 | Apparatus and method of inspecting foreign particle or defect on a sample | Hidetoshi Nishiyama, Yoshimasa Ohshima, Tetsuya Watanabe, Hisato Nakamura, Takahiro Jingu +3 more | 2003-07-22 |