Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654112 | Apparatus and method for inspecting defects | Minori Noguchi, Shunji Maeda, Takanori Ninomiya | 2003-11-25 |
| 6621571 | Method and apparatus for inspecting defects in a patterned specimen | Shunji Maeda, Atsushi Yoshida, Toshihiko Nakata, Hiroaki Shishido, Minoru Yoshida +1 more | 2003-09-16 |
| 6556290 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Minoru Yoshida, Sachio Uto, Hiroaki Shishido +1 more | 2003-04-29 |