Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667806 | Process and apparatus for manufacturing semiconductor device | Yasuhiro Yoshitake, Takeshi Kato | 2003-12-23 |
| 6631547 | Manufacturing method for thin film magnetic heads | Minoru Yoshida, Hideaki Sasazawa, Minoru Yamasaka | 2003-10-14 |
| 6621571 | Method and apparatus for inspecting defects in a patterned specimen | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Hiroaki Shishido, Minoru Yoshida +1 more | 2003-09-16 |
| 6613588 | Floating particle inspection method and its apparatus and a semiconductor device processing apparatus | Hiroyuki Nakano | 2003-09-02 |
| 6576559 | Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses | Takanori Ninomiya, Sachio Uto, Hiroyuki Nakano | 2003-06-10 |
| 6556290 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto +1 more | 2003-04-29 |