Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667806 | Process and apparatus for manufacturing semiconductor device | Takeshi Kato, Toshihiko Nakata | 2003-12-23 |
| 6653032 | Exposure method | Toshiharu Miwa, Tetsuya Yamazaki | 2003-11-25 |
| 6611728 | Inspection system and method for manufacturing electronic devices using the inspection system | Natsuyo Morioka, Hisafumi Iwata, Junko Konishi, Yoko Ikeda, Kazunori Nemoto +1 more | 2003-08-26 |
| 6556955 | Method of determining lethality of defects in circuit pattern inspection, method of selecting defects to be reviewed, and inspection system of circuit patterns involved with the methods | Masataka Shiba, Atsushi Shimoda | 2003-04-29 |
| 6542830 | Process control system | Fumio Mizuno, Seiji Isogai, Kenji Watanabe, Terushige Asakawa, Yuichi Ohyama +12 more | 2003-04-01 |