Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653633 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Shoji Yoshida, Mitsuji Ikeda +2 more | 2003-11-25 |
| 6573499 | Microstructured pattern inspection method | Fumihiro Sasajima, Osamu Komuro | 2003-06-03 |
| 6542830 | Process control system | Seiji Isogai, Kenji Watanabe, Yasuhiro Yoshitake, Terushige Asakawa, Yuichi Ohyama +12 more | 2003-04-01 |
| 6538249 | Image-formation apparatus using charged particle beams under various focus conditions | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Shoji Yoshida, Mitsuji Ikeda +2 more | 2003-03-25 |
| RE37996 | Manufacturing method or an exposing method for a semiconductor device or a semiconductor integrated circuit device and a mask used therefor | Noboru Moriuchi, Seiichiro Shirai, Masayuki Morita | 2003-02-18 |