Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6627888 | Scanning electron microscope | Satoru Yamaguchi, Takashi Iizumi, Hidetoshi Morokuma, Tatsuya Maeda, Juntaro Arima +1 more | 2003-09-30 |
| 6573499 | Microstructured pattern inspection method | Fumihiro Sasajima, Fumio Mizuno | 2003-06-03 |