Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667486 | Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same | Hiroya Ohta, Yasunari Sohda, Norio Saitou, Yoshikiyo Yui, Shin'ichi Hashimoto | 2003-12-23 |
| 6661507 | Pattern inspecting system and pattern inspecting method | Mari Nozoe | 2003-12-09 |
| 6653633 | Charged particle beam apparatus | Atsushi Takane, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2003-11-25 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2003-05-06 |
| 6541784 | Electron beam exposure system and exposing method using an electron beam | Hajime Kawano | 2003-04-01 |
| 6538249 | Image-formation apparatus using charged particle beams under various focus conditions | Atsushi Takane, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida, Mitsuji Ikeda +2 more | 2003-03-25 |