Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6661507 | Pattern inspecting system and pattern inspecting method | Haruo Yoda | 2003-12-09 |
| 6618850 | Inspection method and inspection system using charged particle beam | Hidetoshi Nishiyama, Hiroyuki Shinada | 2003-09-09 |
| 6613593 | Method of fabricating a semiconductor device | Maki Tanaka, Masahiro Watanabe, Kenji Watanabe, Hiroshi Miyai | 2003-09-02 |
| 6586952 | Method of inspecting pattern and inspecting instrument | Mitsuo Suga, Yoichiro Neo, Hidetoshi Nishiyama | 2003-07-01 |
| 6583634 | Method of inspecting circuit pattern and inspecting instrument | Hiroyuki Shinada, Kenji Watanabe, Keiichi Saiki, Aritoshi Sugimoto, Hiroshi Morioka +2 more | 2003-06-24 |
| 6583413 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Hisaya Murakoshi +5 more | 2003-06-24 |
| 6583414 | Method of inspecting pattern and inspecting instrument | Hidetoshi Nishiyama, Shigeaki Hijikata, Kenji Watanabe, Koji Abe | 2003-06-24 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda, Yutaka Kaneko +12 more | 2003-05-06 |
| 6542830 | Process control system | Fumio Mizuno, Seiji Isogai, Kenji Watanabe, Yasuhiro Yoshitake, Terushige Asakawa +12 more | 2003-04-01 |
| 6504609 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Hiroshi Morioka, Yasutsugu Usami, Takashi Hiroi | 2003-01-07 |