Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650409 | Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system | Minori Noguchi, Yukio Kembo, Hiroshi Morioka, Hideaki Doi, Masataka Shiba +6 more | 2003-11-18 |
| 6618850 | Inspection method and inspection system using charged particle beam | Mari Nozoe, Hiroyuki Shinada | 2003-09-09 |
| 6597448 | Apparatus and method of inspecting foreign particle or defect on a sample | Minori Noguchi, Yoshimasa Ohshima, Tetsuya Watanabe, Hisato Nakamura, Takahiro Jingu +3 more | 2003-07-22 |
| 6586952 | Method of inspecting pattern and inspecting instrument | Mari Nozoe, Mitsuo Suga, Yoichiro Neo | 2003-07-01 |
| 6583414 | Method of inspecting pattern and inspecting instrument | Mari Nozoe, Shigeaki Hijikata, Kenji Watanabe, Koji Abe | 2003-06-24 |