Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650409 | Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system | Minori Noguchi, Yukio Kembo, Hiroshi Morioka, Hidetoshi Nishiyama, Masataka Shiba +6 more | 2003-11-18 |
| 6622054 | Method monitoring a quality of electronic circuits and its manufacturing condition and system for it | Hirohito Okuda, Toshifumi Honda, Hisae Yamamura, Yuji Takagi, Shigeshi Yoshinaga | 2003-09-16 |
| 6614923 | Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof | Chie Shishido, Yuji Takagi, Shuji Maeda, Takanori Ninomiya, Takashi Hiroi +1 more | 2003-09-02 |
| 6546308 | Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices | Yuji Takagi, Makoto Ono | 2003-04-08 |