Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657221 | Image classification method, observation method, and apparatus thereof with different stage moving velocities | Ryo Nakagaki, Yuji Takagi, Masahiro Watanabe, Minori Noguchi, Kazuo Aoki | 2003-12-02 |
| 6614022 | Pattern inspection method and apparatus using electron beam | Asahiro Kuni, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2003-09-02 |
| 6614923 | Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof | Chie Shishido, Yuji Takagi, Shuji Maeda, Takanori Ninomiya, Masahiro Watanabe +1 more | 2003-09-02 |
| 6587581 | Visual inspection method and apparatus therefor | Yukio Matsuyama, Yuji Takagi, Maki Tanaka, Asahiro Kuni, Junzou Azuma +2 more | 2003-07-01 |
| 6567168 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara | 2003-05-20 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2003-05-06 |
| 6559459 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Hiroyuki Shinada, Taku Ninomiya | 2003-05-06 |
| 6504609 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Yasutsugu Usami | 2003-01-07 |